3D packages and methods for forming the same

ABSTRACT

Embodiments of the present disclosure include a semiconductor device and methods of forming a semiconductor device. An embodiment is a semiconductor device comprising an interconnecting structure consisting of a plurality of thin film layers and a plurality of metal layers disposed therein, each of the plurality of metal layers having substantially a same top surface area, and a die comprising an active surface and a backside surface opposite the active surface, the active surface being directly coupled to a first side of the interconnecting structure. The semiconductor device further comprises a first connector directly coupled to a second side of the interconnecting structure, the second side being opposite the first side.

PRIORITY CLAIM AND CROSS-REFERENCE

This application is a continuation of U.S. patent application Ser. No.16/863,518, filed on Apr. 30, 2020, which application is a continuationof U.S. patent application Ser. No. 16/362,012, filed on Mar. 22, 2019,now U.S. Pat. No. 10,665,474, issued on May 26, 2020, which applicationis a continuation of U.S. patent application Ser. No. 15/054,770, filedFeb. 26, 2016, now U.S. Pat. No. 10,269,584, issued on Apr. 23, 2019,which application is a divisional of U.S. patent application Ser. No.13/763,335, entitled “3D Packages and Methods for Forming the Same,”filed on, Feb. 8, 2013, now U.S. Pat. No. 9,299,649, issued on Mar. 29,2016, which applications are incorporated herein by reference.

BACKGROUND

Since the invention of the integrated circuit (IC), the semiconductorindustry has experienced rapid growth due to continuous improvements inthe integration density of various electronic components (i.e.,transistors, diodes, resistors, capacitors, etc.). For the most part,this improvement in integration density has come from repeatedreductions in minimum feature size, which allows more components to beintegrated into a given area.

These integration improvements are essentially two-dimensional (2D) innature, in that the volume occupied by the integrated components isessentially on the surface of the semiconductor wafer. Although dramaticimprovement in lithography has resulted in considerable improvement in2D IC formation, there are physical limits to the density that can beachieved in two dimensions. One of these limits is the minimum sizeneeded to make these components. In addition, when more devices are putinto one chip or die, more complex designs are required.

In an attempt to further increase circuit density, three-dimensional(3D) ICs have been investigated. In a typical formation process of a 3DIC, two or more dies or chips are bonded together and electricalconnections are formed between each die or chip and contact pads on asubstrate.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present embodiments, and theadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawings, in which:

FIG. 1 illustrates a flow diagram of a method for manufacturing asemiconductor device according to an embodiment;

FIGS. 2A through 2H illustrate intermediate stages of forming asemiconductor device according to an embodiment;

FIGS. 3A and 3B illustrate intermediate stages of forming asemiconductor device according to another embodiment;

FIG. 4 illustrates a semiconductor device according to anotherembodiment;

FIG. 5 illustrates a flow diagram of a method for manufacturing asemiconductor device according to another embodiment; and

FIGS. 6A through 6D illustrate intermediate stages of forming asemiconductor device according to another embodiment.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

Reference will now be made in detail to embodiments illustrated in theaccompanying drawings. Wherever possible, the same reference numbers areused in the drawings and the description to refer to the same or likeparts. In the drawings, the shape and thickness may be exaggerated forclarity and convenience. This description will be directed in particularto elements forming part of, or cooperating more directly with, methodsand apparatus in accordance with the present disclosure. It is to beunderstood that elements not specifically shown or described may takevarious forms well known to those skilled in the art. Many alternativesand modifications will be apparent to those skilled in the art, onceinformed by the present disclosure.

Reference throughout this specification to “one embodiment” or “anembodiment” means that a particular feature, structure, orcharacteristic described in connection with the embodiment is includedin at least one embodiment. Thus, the appearances of the phrases “in oneembodiment” or “in an embodiment” in various places throughout thisspecification are not necessarily all referring to the same embodiment.Furthermore, the particular features, structures, or characteristics maybe combined in any suitable manner in one or more embodiments. It shouldbe appreciated that the following figures are not drawn to scale;rather, these figures are merely intended for illustration.

Embodiments will be described with respect to a specific context, namelya semiconductor device with an interconnecting structure without asubstrate and without through substrate vias. Other embodiments may alsobe applied, however, to other interconnecting structures.

In a formation process of a 3D IC, two or more dies or chips are bondedtogether and electrical connections are formed between each die or chipand contact pads on a substrate. For example, interposer stacking ispart of 3D IC technology, where a through substrate via (TSV) embeddedinterposer is connected to a device chip or die with a micro bump.Interposer stacking manufacturing process flows can be separated into atleast two types. In a first type, a chip-on-chip-on-substrate (CoCoS)process flow, a silicon interposer chip is first mounted onto apackaging substrate, and then a different device silicon chip is bondedonto the interposer. In a second type, a chip-on-wafer-on-substrate(CoWoS) process flow, a device silicon chip is first bonded onto asilicon interposer wafer, which is then diced. The resulting stackedsilicon is then mounted onto a substrate.

FIG. 1 illustrates a flow diagram of a method 200 for manufacturing asemiconductor device in accordance with an embodiment. While method 200is illustrated and described below as a series of acts or events, itwill be appreciated that the illustrated ordering of such acts or eventsare not to be limited to a particular embodiment. For example, some actsmay occur in different orders and/or concurrently with other acts orevents apart from those illustrated and/or described herein. Inaddition, not all illustrated acts may be required to implement one ormore aspects or embodiments of the description herein. Further, one ormore of the acts depicted herein may be carried out in one or moreseparate acts and/or phases.

The operations of method 200 will be described with reference to FIGS.2A through 2H as an example, although the method 200 may be applied toother embodiments. At operation 202, an interconnecting structure isformed over a first substrate. Operation 202 is illustrated in FIGS. 2Aand 2B as described below.

Referring to FIG. 2A, a semiconductor device 10 at an intermediate stageof processing is illustrated. The semiconductor device 10 includes apassivation layer 22 formed on a first substrate 20, an interconnectingstructure 30 formed on the passivation layer 22, a die 54 bonded to afirst side 31 of the interconnecting structure 30 with connectors 50 onunder bump metallizations (UBMs) 46, and a carrier 56 mounted to the die54.

The first substrate 20 may be formed of a semiconductor material, suchas silicon, silicon germanium, silicon carbide, gallium arsenide, orother commonly used semiconductor materials. Alternatively, the firstsubstrate 20 is formed of a dielectric material, such as glass, aluminumoxide, aluminum nitride, the like, or a combination thereof. The firstsubstrate 20 is free from active devices (such as transistors anddiodes) and passive devices (such as inductors, resistors, andcapacitors).

The passivation layer 22 is formed over the first substrate 20. Thepassivation layer 22 can be silicon nitride, silicon carbide, siliconoxide, low-k dielectrics such as carbon doped oxides, extremely low-kdielectrics such as porous carbon doped silicon dioxide, a polymer, suchas an epoxy, polyimide, benzocyclobutene (BCB), polybenzoxazole (PBO),the like, or a combination thereof, although other relatively soft,often organic, dielectric materials can also be used, and deposited bychemical vapor deposition (CVD), physical vapor deposition (PVD), atomiclayer deposition (ALD), a spin-on-dielectric process, the like, or acombination thereof. In some embodiments, the passivation layer 22 is apolymer such as polyimide.

The interconnecting structure 30 comprises a plurality of thin filmlayers with a plurality of metal layers disposed therein. The pluralityof thin film layers include inter-metal dielectrics (IMDs) 38 and etchstop layers 32. The plurality of metal layers include metal lines 36 andvias 40. The metal lines 36 and vias 40 may electrically connect the die54 on a first side 31 of the interconnecting structure 30 with variousdevices and/or substrates on a second side 33 of the interconnectingstructure 30 to form functional circuitry (see FIG. 2H). The IMDs 38 maybe formed of oxides such as silicon oxide, borophosphosilicate glass(BPSG), undoped silicate glass (USG), fluorinated silicate glass (FSG),low-k dielectric materials, the like, or a combination thereof.Different respective IMDs may comprise different materials. The low-kdielectric materials may have k values lower than 3.9. In someembodiments, the low-k dielectric materials have a k value less than 3.0or even less than 2.5. In some other embodiments, the low-k dielectricmaterials have a k value less than 2.0. The etch stop layers 32 can besilicon nitride, silicon carbide, silicon oxide, low-k dielectrics suchas carbon doped oxides, extremely low-k dielectrics such as porouscarbon doped silicon dioxide, the like, or a combination thereof, anddeposited by CVD, PVD, ALD, a spin-on-dielectric process, the like, or acombination thereof. Conductive materials, such as copper, aluminum,titanium, the like, or a combination thereof, with or without a barrierlayer, can be used as the metal lines 36 and the vias 40. In anembodiment, each of the metal layers M1 through Mn have a thickness in arange from about 5.0 kÅ to about 30.0 kÅ.

Interconnecting structure 30 includes a plurality of metal layers,namely M1, M2, M3, and Mn, wherein metal layer M1 is the metal layerimmediately above the passivation layer 22, while metal layers M2 and M3are intermediate layers above metal layer M1, and metal layer Mn is themetal layer that is immediately under the overlying UBMs 46, wherein thevalue n of Mn is greater than or equal to two. The metal layer Mn may bereferred to as a metal pad or a contact pad. Throughout the description,the term “metal layer” refers to the collection of the metal lines inthe same layer, and the term “metal layer” does not include a throughsubstrate via (TSV). Metal layers M1 through Mn are formed in the IMDs38.

As illustrated in FIG. 2A, the interconnecting structure 30 may comprisea first portion 30A and a second portion 30B. The first portion 30A hasa non-continuous metal line 36 of the metal layer M1, and the secondportion 30B has metal pad in the metal line 36 of metal layer M1 thatmay be larger than the metal lines 36 in the other layers. In otherembodiments, other layers M2 through Mn may have metal lines 36 that arelarger metal lines 36 in metal layer M1. The metal pad in the secondportion 30B may have a connector formed over it in subsequent processing(see FIG. 2G). In some embodiments, both the first and second portions30A and 30B may comprise metal pads in the metal lines 36 of metal layerM1 and each may have connectors formed the metal pads (see FIGS. 6Athrough 6D).

In an embodiment, the metal line 36 of metal layer M1 has a surfacesubstantially coplanar with the second side 33 of the interconnectingstructure 30, and the metal line 36 of the metal layer Mn has a surfacesubstantially coplanar with the first side 31 of the interconnectingstructure 30. There may be ten vias 40 or up to N vias 40 connecting theadjacent metal lines 36 rather than the two vias 40 illustrated in FIG.2A or the nine vias 40 illustrated in FIG. 2B. The large number of vias40 in each metal layer may be used to lower the resistance between theconnectors 50 and the connectors 68 (see FIG. 2G), to improve heatdissipation in the interconnecting structure 30, and/or for structuralsupport in the interconnecting structure 30.

The metal layers, M1, M2, M3, and Mn may be formed using a single and/ora dual damascene process, a via-first process, or a metal-first process.Damascene means formation of a patterned layer embedded in another layersuch that the top surfaces of the two layers are coplanar. A damasceneprocess which creates either only trenches or vias is known as a singledamascene process. A damascene process which creates both trenches andvias at once is known as a dual damascene process.

In an exemplary embodiment, the metal layers M1 through Mn are formedusing a dual damascene process. In this example, the formation of the M1layer may begin with the formation of an etch stop layer 32 on thepassivation layer 22 and with an IMD 38 on the etch stop layer 32. Oncethe IMD 38 is deposited, portions of the IMD 38 may be etched away toform recessed features, such as trenches and vias, which can be filledwith conductive material to connect different regions of theinterconnecting structure 30 and accommodate the metal lines 36 and vias40. This process may be repeated for the remaining metal layers M2through Mn.

The number of metal layers M1 to Mn, the number of IMDs 38, the numberof vias 40, and the number of metal lines 36 are only for illustrativepurposes and are not limiting. There could be other number of layersthat is more or less than the four metal layers illustrated. There maybe other number of IMD layers, other number of vias, and other number ofmetal lines different from those illustrated in FIG. 2A.

FIG. 2B illustrates a top-view of the interconnecting structure 30 fromabove metal layer Mn according to an embodiment. As illustrated in FIG.2B, the vias 40A are in the metal layer Mn and the vias 40B are in thenext lower metal layer M3. In an embodiment, the metal lines 36 have awidth W1 from about 10 μm to about 30 μm and a length L1 from about 10μm to about 30 μm. Further the vias 40 have a width W2 in a range fromabout 0.5 μm to about 1.5 μm and a length L2 from about 0.5 μm to about1.5 μm. In an embodiment in which the vias 40A are circular, the widthW2 or the length L2 may be considered a diameter. FIG. 2B illustratesthat each metal line 36 has nine vias 40A interconnecting the metal line36 to the next metal line 36 in the metal layer above and/or below themetal line 36, although other embodiments may have more or less vias 40in each metal layer. As illustrated in FIG. 2B, in some embodiments, thevias 40B of a lower metal layer are not aligned (offset) from the vias40A of metal layer Mn and the vias 40B may be a different size than vias40A. Although only metal layer Mn is visible in FIG. 2B, in someembodiments, all the metal layers, M1 through M3, below the illustratedmetal layer Mn are substantially vertically aligned such that the metallines 36 and vias 40 of the lower metal layers are the same as theillustrated metal layer Mn. In some embodiments, a top surface area ofthe metal lines 36 in each of the metal layers may be substantiallyequal to each of the other metal layers of the interconnecting structure30. In other embodiments, the metal layers M1 through Mn are not alignedand have different top surface areas. Although FIG. 2B illustrates themetal lines 36 and the vias 40A and 40B having a square shape, the metallines 36 and the vias 40A and 40B may be any suitable shape such as, acircle, a rectangle, a hexagon, other polygons, or the like.

At operation 204, a die is bonded to a first side of the interconnectingstructure. Operation 204 is illustrated in FIG. 2A as described below.

Referring back to FIG. 2A, after the formation of the interconnectingstructure 30, a first passivation layer 41 and a second passivationlayer 42 may be formed to cover and protect the metal lines 36 and theinterconnecting structure 30. The first and second passivation layers 41and 42 may be similar to the passivation layer 22 discussed above andwill not be repeated herein, although the passivation layer 22 and thefirst and second passivation layers 41 and 42 need not be the same.

After the formation of the second passivation layer 42, openings may beformed through the second passivation layer 42 and the first passivationlayer 41 to expose portions of the metal lines 36 of metal layer Mn. Theopenings allow for electrical and physical coupling between metal lines36 of metal layer Mn of the interconnecting structure 30 and thesubsequently formed UBMs 46. These openings may be formed using asuitable photolithographic mask and etching process, although anysuitable process to expose portions of the metal lines 36 of metal layerMn may be used.

After the openings are formed through the first and second passivationlayers 41 and 42, the UBMs 46 may be formed along the second passivationlayer 42 and in the openings over the metal lines 36 of metal layer Mn.In an embodiment the UBMs 46 may comprise three layers of conductivematerials, such as a layer of titanium, a layer of copper, and a layerof nickel. However, one of ordinary skill in the art will recognize thatthere are many suitable arrangements of materials and layers, such as anarrangement of chrome/chrome-copper alloy/copper/gold, an arrangement oftitanium/titanium tungsten/copper, or an arrangement ofcopper/nickel/gold, that are suitable for the formation of the UBM 46.Any suitable materials or layers of material that may be used for theUBMs 46 are fully intended to be included within the scope of thecurrent application.

The UBMs 46 may be created by forming each layer over the secondpassivation layer 42 and along the interior of the openings through thefirst and second passivation layers 41 and 42 to the metal lines 36 ofthe metal layer Mn. The forming of each layer may be performed using aplating process, such as electrochemical plating, although otherprocesses of formation, such as sputtering, evaporation, orplasma-enhanced CVD (PECVD) process, may alternatively be used dependingupon the desired materials. Once the desired layers have been formed,portions of the layers may then be removed through a suitablephotolithographic masking and etching process to remove the undesiredmaterial and to leave the UBMs 46 in a desired shape, such as acircular, octagonal, square, or rectangular shape, although any desiredshape may alternatively be formed.

After the UBMs 46 are formed, an active surface of the die 54, theactive surface comprising the connectors 50, is bonded to a first side31 of the interconnecting structure 30 by way of the connectors 50 andthe UBMs 46. The die 54 may be a device die comprising integratedcircuit devices, such as transistors, capacitors, inductors, resistors(not shown), and the like, therein. Further, the die 54 may be a logicdie comprising core circuits, and may be, for example, a centralprocessing unit (CPU) die. In some embodiments, the die 54 may comprisemultiple stacked dies like a memory stacking. The connectors 50 may bebonded to contacts or bond pads (not shown) on the die 54.

The connectors 50 are illustrated as micro bumps in FIG. 2A, however inother embodiments, the connectors 50 may be solder balls, metal pillars,controlled collapse chip connection (C4) bumps, electrolessnickel-electroless palladium-immersion gold technique (ENEPIG) formedbumps, or the like. The connectors 50 may comprise a conductive materialsuch as copper, aluminum, gold, nickel, silver, palladium, tin, thelike, or a combination thereof. In an embodiment in which the connectors50 are tin solder bumps, the connectors 50 may be formed by initiallyforming a layer of tin through such commonly used methods such asevaporation, electroplating, printing, solder transfer, ball placement,or the like. Once a layer of tin has been formed on the structure, areflow may be performed in order to shape the material into the desiredbump shape. In another embodiment the connectors 50 may be metal pillars(such as copper pillars), which may be pre-formed before the die 54 isplaced over the interconnecting structure 30. The metal pillars may beformed by a plating process and may be solder free and comprisesubstantially vertical sidewalls. In this embodiment, the UBMs 46 may beomitted as the metal pillars may extend from the metal lines 36 to thedie 54.

The bonding between the die 54 and the interconnecting structure 30 maybe a solder bonding or a direct metal-to-metal (such as acopper-to-copper or tin-to-tin) bonding. In an embodiment, the die 54may be bonded to the interconnecting structure 30 by a reflow process.During this reflow process, the connectors 50 are in contact with theUBMs 46 to physically and electrically couple the die 54 to theinterconnecting structure 30.

An underfill material 52 may be injected or otherwise formed in thespace between the die 54 and the interconnecting structure 30. Theunderfill material 52 may, for example, comprise a liquid epoxy,deformable gel, silicon rubber, or the like, that is dispensed betweenthe die 54 and the interconnecting structure 30, and then cured toharden. This underfill material 52 is used, among other things, toreduce cracking in and to protect the connectors 50.

A carrier 56 may then be mounted to a backside surface of the die 54through an adhesive layer (not shown). The adhesive layer may bedisposed, for example laminated, on the carrier 56. The adhesive layer(not shown) may be formed of a glue, such as an ultra-violet glue, ormay be a lamination layer formed of a foil. The carrier 56 may be anysuitable substrate that provides (during intermediary operations of thefabrication process) mechanical support for the layers on top. Thecarrier 56 may comprise a wafer comprising glass, silicon (e.g., asilicon wafer), silicon oxide, metal plate, a ceramic material, or thelike.

At operation 206, the first substrate 20 is thinned. Operation 206 isillustrated in FIG. 2C as described below.

FIG. 2C illustrates the thinning of the backside surface of the firstsubstrate 20. The thinning process may be performed using an etchingprocess, a chemical mechanical polishing (CMP) process, and/or aplanarization process, such as a grinding process.

At operation 208, the remaining portion of the first substrate isremoved. Operation 208 is illustrated in FIG. 2D as described below.

FIG. 2D illustrates the removal of the remaining portion of the firstsubstrate 20. The remaining portion of the first substrate 20 may beremoved by a wet etch process that is selective to the first substrate20. In an embodiment, the selective wet etch comprises an etchantcomprising tetramethylammonium hydroxide (TMAH) as it enables selectivecrystallographic etching of silicon. In another embodiment, theselective wet etch comprises HF and HNO₃. The selective wet etch removesthe remaining portion of the first substrate 20 to expose thepassivation layer 22. In an embodiment, the interconnecting structure 30has a thickness T1 in a range from about 3 μm to about 10 μm. In anotherembodiment, the interconnecting structure 30 may have a thickness T1 ina range from about 3 μm to about 30 μm.

With the removal of the first substrate 20, the interconnectingstructure 30 may provide an interface and structure to couple the die 54on its first side 31 to one or more devices and/or substrates on itssecond side 33. In some embodiments, the interconnecting structure 30 isfree from a substrate and is also free from through substrate vias(TSVs). This provides for an interconnecting structure 30 that may bethinner than a structure with a substrate and also an interconnectingstructure 30 that costs less to manufacture than a structure with TSVs.Further, the interconnecting structure 30 is more flexible and can bend(warp) and may accommodate the stresses and forces of subsequentprocessing (e.g. bonding the die 54 to the interconnecting structure 30)better than a structure with a substrate.

At operation 210 a connector is formed over the second side 33 of theinterconnecting structure 30. Operation 210 is illustrated in FIGS. 2Ethrough 2G as described below.

FIG. 2E illustrates the formation of an opening over the second side ofthe interconnecting structure. In FIG. 2E, the semiconductor device 10has been flipped over so that the carrier 56 is towards the bottom ofthe figure. An opening 60 may be formed through the passivation layer 22to expose a portion the metal line 36 of metal layer M1. The opening 60allows for electrical and physical contact between the metal lines 36 ofmetal layer M1 of the interconnecting structure 30 and the subsequentlyformed connector 68, wherein the connector 68 includes a seed layer 62(see FIG. 2G). The opening 60 may be formed using a suitablephotolithographic mask and etching process, although any suitableprocess to expose a portion of the metal line 36 of metal layer M1 maybe used.

FIG. 2F illustrates the formation of the seed layer 62 over thepassivation layer 22 and in the opening 60, a photoresist 64 over theseed layer 62, and a conductive material 66 over the metal line 36 ofthe metal layer M1. In some embodiments, one or more barrier layers (notshown) may be formed in the opening 60 and along the passivation layer22 comprising titanium, titanium nitride, tantalum, tantalum nitride,the like, or a combination thereof. The one or more barrier layers maybe formed by CVD, PVD, PECVD, ALD, the like, or a combination thereof.The seed layer 62 may comprise a titanium copper alloy or the like onthe one or more barrier layers, if present, through CVD, sputtering, thelike, or a combination thereof. The photoresist 64 may then be formed tocover the seed layer, and the photoresist may then be patterned toexpose those portions of the seed layer that are located where theconductive material 66 is desired to be located. Once the photoresisthas been formed and patterned, the conductive material 66, such ascopper, aluminum, gold, nickel, silver, tin, the like, or a combinationthereof may be formed on the seed layer through a deposition processsuch as plating, CVD, PVD, the like, or a combination thereof.

FIG. 2G illustrates the removal of the photoresist 64, the patterning ofthe seed layer 62, and the formation of the connector 68 from theconductive material 66. The photoresist 64 may be removed through asuitable removal process such as ashing. Additionally, after the removalof the photoresist 64, those portions of the seed layer 62 that werecovered by the photoresist 64 may be removed through, for example, asuitable etch process using the conductive material 66 as a mask. Theconductive material 66 may be shaped to form a connector 68 with arounded top surface by performing a reflow process on the conductivematerial 66. In some embodiments, the connector 68 may be substantiallyaligned with one of the UBMs 46 and connectors 50 in the second portion30B of the interconnecting structure 30 as illustrated in FIG. 2G. Inother embodiments, there may be another connector 68 substantiallyaligned with another connector 50 in the first portion 30A of theinterconnecting structure 30.

As illustrated in FIG. 2G, in some embodiments, there may be a pluralityof semiconductor devices 10 formed adjacent each other over a topsurface of the carrier 56. In these embodiments, after the formation ofthe connector 68, the carrier 56 may be demounted from the plurality ofsemiconductor devices 10. Next, semiconductor devices 10 may be sawedapart, so that the semiconductor devices 10 are separated from eachother. In some embodiments, in order to saw the semiconductor devices10, the plurality of semiconductor devices are attached on a dicing tape(not shown), and are diced when attached to the dicing tape.

At operation 212, a second side of the interconnecting structure may bebonded to a second substrate. Operation 212 is illustrated in FIG. 2H asdescribed below.

FIG. 2H illustrates bonding the second side 33 of the interconnectingstructure 30 to a second substrate 70 by way of a bonding structure 74.The second substrate 70 may be similar to the first substrate 20 asdescribed above, although the first substrate 20 and the secondsubstrate 70 need not be the same. Second substrate 70 is, in onealternative embodiment, based on an insulating core such as a fiberglassreinforced resin core. One example core material is fiberglass resinsuch as FR4. Alternatives for the core material includebismaleimide-triazine (BT) resin, or alternatively, other PC boardmaterials or films. Build up films such as Ajinomoto build-up film (ABF)or other laminates may be used for second substrate 70.

The second substrate 70 has a contact 72 which will be physically andelectrically coupled to the connector 68. In some embodiments, thecontact 72 may comprise a pre-solder layer, and in other embodiments,the contact 72 may comprise a bond pad or a UBM. The contact 72 maycomprise solder, tin, silver, tin, the like, or a combination thereof.In an embodiment, the second substrate 70 may be bonded to theinterconnecting structure 30 by a reflow process. During this reflowprocess, the contact 72 on the second substrate 70 is in contact withthe connectors 68 to form a bonding structure 74 to physically andelectrically couple the second substrate 70 to the interconnectingstructure 30.

The number of bonding structures 74, the number of contacts 72, thenumber of UBMs 46, and the number of connectors 50 in FIG. 2H are onlyfor illustrative purposes and are not limiting. There could be anysuitable number of UBMs 46, bonding structures 74, connectors 50, andcontacts 72.

FIGS. 3A and 3B illustrate a semiconductor device 12 according toanother embodiment, wherein the connector on the second side 33 of theinterconnecting structure 30 is formed by a solder ball drop method.Details regarding this embodiment that are similar to those for thepreviously described embodiment will not be repeated herein.

FIG. 3A illustrates a semiconductor device 12 with a photoresist 90 on apassivation layer 22, flux 92 on the metal line 36 of the metal layerM1, and a solder ball 98 on the flux 92. In an embodiment, the flux 92may be formed on the metal line 36 by dipping the metal line 36 in fluxso that flux 92 may be deposited on the metal line 36 in the openingformed in the photoresist 90. In another embodiment, the flux 92 may bedeposited as a paste and may be printed on the metal line 36 and in theopening formed in the photoresist 90. After the flux 92 is formed, asolder ball 98 is formed on the flux 92. The solder ball 98 may beformed by a solder ball drop process. The solder ball drop process isknown in the art, and thus, is not detailed herein.

FIG. 3B illustrates the formation of the connector 100. The connector100 may allow various other devices and/or substrates to be electricallycoupled to the second side 33 of the interconnecting structure 30 (seeFIG. 2H). The photoresist 90 may be removed through a suitable removalprocess such as ashing. The connector 100 is formed by performing areflow process on the solder ball 98 and the flux 92. The connector 100may cost less to form than the connector 68 of FIG. 2G. However, anembodiment with connector 68 may have better electrical migrationproperties than an embodiment with connector 100 due to intermetalliccompounds near an interface with metal layer M1 of the connector 100embodiment. The thermal cycling properties of the connector 100 aresimilar to the thermal cycling properties of the connector 68.

FIG. 4 illustrates a semiconductor device 14 according to anotherembodiment, wherein the connector on the second side 33 of theinterconnecting structure 30 includes a polymer layer on the passivationlayer 22. Details regarding this embodiment that are similar to thosefor the previously described embodiment will not be repeated herein.

FIG. 4 illustrates a semiconductor device with a polymer layer 102 onthe passivation layer 22. The polymer layer 102 may be formed of apolymer, such as an epoxy, polyimide, BCB, PBO, the like, or acombination thereof, although other relatively soft, often organic,dielectric materials can also be used. The polymer layer 102 may beformed by spin coating or other commonly used methods. After the polymerlayer 102 is formed on the passivation layer 22, an opening may beformed through the polymer layer 102 and the passivation layer 22 toexpose a portion of the metal line 36 of the metal layer M1. The openingmay be performed as described above with reference to FIG. 2E and willnot be repeated herein. A seed layer 104 may be deposited along thepolymer layer 102 and in the opening over the metal line 36 and aconnector 106 may be formed on the seed layer 104 and in the openingover the metal line 36 of the metal layer M1. The seed layer 104 and theconnector 106 may be similar to the seed layer 62 and the connector 68as described above with reference to FIGS. 2F and 2G and the descriptionof them will not be repeated herein.

FIG. 5 illustrates a flow diagram of a method 500 for manufacturing asemiconductor device in accordance with an embodiment. While method 500is illustrated and described below as a series of acts or events, itwill be appreciated that the illustrated ordering of such acts or eventsare not to be limited to a particular embodiment. For example, some actsmay occur in different orders and/or concurrently with other acts orevents apart from those illustrated and/or described herein. Inaddition, not all illustrated acts may be required to implement one ormore aspects or embodiments of the description herein. Further, one ormore of the acts depicted herein may be carried out in one or moreseparate acts and/or phases.

The operations of method 500 will be described with reference to FIGS.6A through 6D as an example, although the method 500 may be applied toother embodiments.

At operation 502, an interconnecting structure is formed over a firstsubstrate. At operation 504, a connector is formed over a first side ofthe interconnecting structure 30. Operations 502 and 504 are illustratedin FIG. 6A as described below.

FIG. 6A illustrates a semiconductor device 16 at an intermediate stageof processing according to an embodiment. The semiconductor device 16includes a passivation layer 22 formed on a first substrate 20, aninterconnecting structure 30 formed on the passivation layer 22, firstand second passivation layers 41 and 42 over the interconnectingstructure 30, UBMs 46A formed in openings and along the first and secondpassivation layers 41 and 42, connectors 50A formed over the secondpassivation layer 42 and in electrical contact with the first side 31 ofthe interconnecting structure, and a carrier 116 mounted to theconnectors 50A with an adhesive layer 114. UBMS 46A may be similar toUBMS 46 and connectors 50A may be similar to connectors 50 describedabove and the descriptions will not be repeated herein. Detailsregarding this embodiment that are similar to those for the previouslydescribed embodiment will not be repeated herein.

A carrier 116 may then be mounted to the connectors 50A through anadhesive layer 114. The adhesive layer 114 may be disposed, for examplelaminated, on the carrier 116. The adhesive layer 114 may be formed of aglue, such as an ultra-violet glue, or may be a lamination layer formedof a foil. The carrier 116 may be any suitable substrate that provides(during intermediary operations of the fabrication process) mechanicalsupport for the layers on top. The carrier 116 may comprise a wafercomprising glass, silicon (e.g., a silicon wafer), silicon oxide, metalplate, a ceramic material, or the like.

At operation 506, the first substrate is thinned. Operation 506 isillustrated in FIG. 6B as described below.

FIG. 6B illustrates the thinning of the first substrate 20. In FIG. 6B,the semiconductor device 16 has been flipped over so that the carrier116 is towards the bottom of the figure. The thinning process of thefirst substrate 20 may be similar to the process described above withreference to FIG. 2C and the description of them will not be repeatedherein.

At operation 508, the remaining portions of the first substrate 20 maybe removed. Operation 508 is illustrated in FIG. 6C.

FIG. 6C illustrates the removal of the remaining portion of the firstsubstrate 20 and the forming of openings in the passivation layer 22 toexpose portions of the metal lines 36 of the metal layer M1. The removalof the remaining portion of the first substrate 20 may be similar to theprocess described above with reference to FIG. 2D and the descriptionwill not be repeated herein. The openings 118 allow for electrical andphysical coupling between the metal lines 36 of metal layer M1 of theinterconnecting structure 30 and the subsequently formed UBMs 46. Theseopenings may be formed using a suitable photolithographic mask andetching process, although any suitable process to expose portions of themetal lines 36 of metal layer M1 may be used.

At operation 510, a die is bonded to the second side of theinterconnecting structure. Operation 510 is illustrated in FIG. 6D asdescribed below.

FIG. 6D illustrates the formation of the UBMs 46B along the passivationlayer 22 and in the openings 118. The UBMs 46B are formed electricallycontacting the metal lines 36 of the metal layer M1. The UBMs 46B may besimilar to the UBMs 46 described above with reference to FIG. 2A and thedescription of them will not be repeated herein.

After the UBMs 46B are formed, the die 54 may be bonded to the secondside 33 of the interconnecting structure 30 by way of connectors 50Bwith an underfill material 52 between the die 54 and the passivationlayer 22. The die 54 and the process of bonding the die to theinterconnecting structure 30 were described above with reference to FIG.2A and the description of them will not be repeated herein. Theconnectors 50B may be similar to connectors 50 described above and thedescription will not be repeated herein, although connectors 50A andconnectors 50B need not be the same.

At operation 512, the first side of the interconnecting structure may bebonded to a second substrate. Operation 512 may be similar to theprocess described above with reference to FIG. 2H except that thisoperation bonds the first side 31 of the interconnecting structure 30 tothe second substrate rather than the second side 33 of theinterconnecting structure 30 as described above. Thus, the descriptionof this operation will not be repeated herein.

By having an interconnecting structure 30 coupling the die 54 to thesecond substrate 70, the cost of the semiconductor device 10 may be muchlower than other devices. Because the interconnecting structure 30 doesnot have a substrate, through substrate vias (TSVs) are not necessary tocouple the die 54 to the second substrate 70, and TSVs are a significantcost in other devices. However, the yield, reliability, and performanceof the interconnecting structure 30 are not impacted by the removal ofthe substrate and/or the lack of TSVs.

An embodiment is a semiconductor device comprising an interconnectingstructure consisting of a plurality of thin film layers and a pluralityof metal layers disposed therein, each of the plurality of metal layershaving substantially a same top surface area, and a die comprising anactive surface and a backside surface opposite the active surface, theactive surface being directly coupled to a first side of theinterconnecting structure. The semiconductor device further comprises afirst connector directly coupled to a second side of the interconnectingstructure, the second side being opposite the first side.

Another embodiment is a semiconductor device comprising aninterconnecting structure, the interconnecting structure comprising afirst metal line disposed in a first dielectric layer, the first metalline having a first surface substantially coplanar with a first side ofthe interconnecting structure, a second metal line disposed in a seconddielectric layer, the second metal line having a second surfacesubstantially coplanar with a second side of the interconnectingstructure, the second side being opposite the first side, and a setmetal lines extending from the first metal line to the second metalline, each of the set of metal lines disposed in a dielectric layer. Thesemiconductor device further comprises a first connector contacting thefirst metal line, a die comprising an active surface and a backsidesurface opposite the active surface, the active surface comprising asecond connector, the second connector being electrically coupled to thefirst connector, the active surface being substantially parallel to thefirst surface and the second surface, and a third connector contactingthe second metal line.

Yet another embodiment is a method of forming a semiconductor device,the method comprising forming an interconnecting structure over a firstsubstrate, the interconnecting structure comprising a plurality of metallayers disposed in a plurality of thin film dielectric layers, andbonding a die to a first side of the interconnecting structure. Themethod further comprises etching the first substrate from a second sideof the interconnecting substrate, and forming a first connector over thesecond side of the interconnecting structure, the first connectorcoupled to at least one of the plurality of metal layers.

Although the present embodiments and their advantages have beendescribed in detail, it should be understood that various changes,substitutions, and alterations can be made herein without departing fromthe spirit and scope of the disclosure as defined by the appendedclaims. Moreover, the scope of the present application is not intendedto be limited to the particular embodiments of the process, machine,manufacture, composition of matter, means, methods, and operationsdescribed in the specification. As one of ordinary skill in the art willreadily appreciate from the disclosure, processes, machines,manufacture, compositions of matter, means, methods, or operations,presently existing or later to be developed, that perform substantiallythe same function or achieve substantially the same result as thecorresponding embodiments described herein may be utilized according tothe present disclosure. Accordingly, the appended claims are intended toinclude within their scope such processes, machines, manufacture,compositions of matter, means, methods, or operations.

What is claimed is:
 1. A method comprising: providing a first structurecomprising: a semiconductor substrate; and a first dielectric layer onthe semiconductor substrate; forming an interposer structure on a firstside of the first structure, the interposer structure comprising: asecond dielectric layer; and a first conductive layer; after forming theinterposer structure, removing a first portion of the semiconductorsubstrate from the first structure such that a second portion of thesemiconductor substrate remains; and attaching a semiconductor die tothe interposer structure.
 2. The method of claim 1 further comprisingremoving the second portion of the semiconductor substrate, whereinremoving the first portion of the semiconductor substrate using adifferent type of process than removing the second portion of thesemiconductor substrate.
 3. The method of claim 2, wherein removing thefirst portion of the semiconductor substrate comprises a planarizationprocess, and wherein removing the second portion of the semiconductorsubstrate comprises an etching process.
 4. The method of claim 1,wherein: the first structure is on a first side of the interposerstructure; and attaching the semiconductor die to the interposerstructure comprises after removing the first portion of thesemiconductor substrate, attaching the semiconductor die a second sideof the interposer structure opposite the first side of the interposerstructure.
 5. The method of claim 1, wherein after attaching thesemiconductor die to the interposer structure, the semiconductor die ison a side of the interposer structure opposite the first dielectriclayer.
 6. The method of claim 1 further comprising forming a secondconductive layer on the semiconductor substrate, wherein the secondconductive layer is at a different level than the first conductivelayer.
 7. The method of claim 1, wherein the first dielectric layer hasa different material composition than the second dielectric layer. 8.The method of claim 1, wherein the semiconductor substrate is a siliconsubstrate.
 9. A method of manufacturing a semiconductor device, themethod comprising: providing a first structure comprising: a substrate,the substrate being a semiconductor substrate; and a first dielectriclayer on the substrate; forming an interposer structure on the firststructure, the interposer structure comprising: a second dielectriclayer; and a first conductive layer; after forming the interposerstructure, removing a first portion of the substrate from the firststructure such that a second portion of the substrate remains, whereinremoving the first portion of the substrate reduces an overall thicknessof the substrate; attaching a first semiconductor die to the interposerstructure; and attaching a second semiconductor die to an opposite sideof the interposer structure as the first semiconductor die.
 10. Themethod of claim 9 further comprising removing the second portion of thesubstrate with an etching process.
 11. The method of claim 9, whereinremoving the first portion of the substrate comprises grinding thesubstrate.
 12. The method of claim 9, wherein the substrate comprises asilicon substrate.
 13. The method of claim 12 further comprising formingan under metal layer electrically connected to the first conductivelayer.
 14. The method of claim 12, first dielectric layer comprises anorganic material.
 15. A method of manufacturing a semiconductor package,the method comprising: depositing a first dielectric layer on asemiconductor substrate; forming an interconnecting structure, whereinforming the interconnecting structure comprises: forming a firstconductive layer on the semiconductor substrate; depositing a seconddielectric layer on the first dielectric layer; and forming a secondconductive layer on the first dielectric layer; after forming the secondconductive layer, removing a first portion of the semiconductorsubstrate from the semiconductor substrate such that a second portion ofthe semiconductor substrate remains; and attaching a semiconductor dieto the interconnecting structure, wherein the interconnecting structureis between the semiconductor die and the first dielectric layer.
 16. Themethod of claim 15, wherein removing the first portion of thesemiconductor substrate is performed before attaching the semiconductordie.
 17. The method of claim 15, wherein the semiconductor substrate isa silicon substrate.
 18. The method of claim 15 further comprisingremoving the second portion of the semiconductor substrate by etching,and forming a conductive structure electrically connected to the firstconductive layer.
 19. The method of claim 15, wherein the firstdielectric layer has a different material composition than the seconddielectric layer.